The categories
How low an ILS approach may be flown depends on the installation as much as the aircraft: per ICAO (International Civil Aviation Organization) Annex 10, ILS approaches are divided into facility performance categories. The operation categories, defined by decision height (DH) and RVR (runway visual range):
Category I — DH not lower than 200 ft, with visibility at least 800 m or RVR at least 550 m;
Category II — DH lower than 200 ft but not lower than 100 ft, RVR at least 300 m;
Category IIIA — DH lower than 100 ft, or no DH, with RVR at least 175 m;
Category IIIB — DH lower than 50 ft, or no DH, with RVR below 175 m but at least 50 m;
Category IIIC — no DH and no RVR limitations.
Category III changes what the beams are for: for all Category III operations, guidance information is provided from the coverage limits of the facility to, and along, the surface of the runway: the signal is flown all the way to the ground, and on IIIB and IIIC through the roll-out. That is also why the accuracy requirements are progressively higher for CAT I, CAT II and CAT III: the lower the decision height, the less height and time remain to recognise a guidance error and fly away from it, until at CAT III there is no margin at all and the beams must be good enough to be followed blind to the surface.
Flying tolerances
The pilot's own accuracy has numbers too, from ICAO Doc 8168, and they are the VOR lesson's criterion transplanted onto the finer scale: to be considered established on an ILS track, the LOC must be flown within half-full-scale deflection of the required track, and the aircraft has to be established within half-scale deflection of the LOC before starting descent on the GP. On the glide path itself, the GP is to be flown to a maximum of half-scale fly-up deflection, in order to stay within protected airspace: fly-up deflection means the needle commanding up, the aircraft below the path, and below half scale the obstacle protection surveyed for the procedure no longer holds.
Past those limits the instruction is not to correct harder but to leave: if the pilot deviates by more than half-course deflection on the LOC, or by more than half-dot deflection on the GP, an immediate go-around should be executed, because obstacle clearance may no longer be guaranteed. Notice how much tighter the go-around trigger is stated for the vertical channel: half a dot on the GP, against half the course scale on the LOC. On approach, height is what there is least of.
What bends the beams
The signal itself is not perfectly straight. ILS beam bends are deviations from the nominal LOC and GP respectively, and they can be assessed by flight test: an aircraft flies the beam with precise reference equipment and maps where the radiated line wanders from the geometric one. A major source of trouble is multipath interference, caused by reflections from objects within the ILS coverage area: buildings, terrain, and above all large aircraft and vehicles near the antennas, whose reflections add to the direct signal and move the apparent centre line.
That last source is managed on the ground, with two defined zones:
ILS-critical area — an area of defined dimensions around the LOC and GP antennas, where vehicles, including aircraft, are excluded during all ILS operations;
ILS-sensitive area — extends beyond the critical area; there, the parking or movement of vehicles, including aircraft, is controlled to prevent the possibility of unacceptable interference to the ILS signal during ILS operations.
This is why, in low visibility, holding points move back and taxi clearances slow down: the geography of the aerodrome is protecting the beam.